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parameters | Ra, Rz, Rq, Rt, Rp, Rv, Rc |
Range | ±80um |
Display Accuracy | ±10% |
Indication variability | ≤6% |
Resolution | 0.01um |
Probe - Type | Inductive |
Probe - Stylus radius / angle | 5um |
Probe - Stylus material | Diamond |
Measuring Force | 4mN(0.4gf) |
Measuring Unit | Um/Uin |
Sensor Angle | 900 |
Longitudinal radius of guide head | 45mm |
Max. Driving Length | 6mm |
Traverse speed | λ1: cut off =0.25mm, Vt=0.135mm/s λ2: cut off = 0.8mm, Vt=0.5mm/s λ3: cut off = 2.5mm, Vt=1mm/s |
Power | Built-in Rechargeable battery |