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| parameters | Ra, Rz, Rq, Rt, Rp, Rv, Rc |
| Range | ±80um |
| Display Accuracy | ±10% |
| Indication variability | ≤6% |
| Resolution | 0.01um |
| Probe - Type | Inductive |
| Probe - Stylus radius / angle | 5um |
| Probe - Stylus material | Diamond |
| Measuring Force | 4mN(0.4gf) |
| Measuring Unit | Um/Uin |
| Sensor Angle | 900 |
| Longitudinal radius of guide head | 45mm |
| Max. Driving Length | 6mm |
| Traverse speed | λ1: cut off =0.25mm, Vt=0.135mm/s λ2: cut off = 0.8mm, Vt=0.5mm/s λ3: cut off = 2.5mm, Vt=1mm/s |
| Power | Built-in Rechargeable battery |
